Origin of the defect structures in oxygen-implanted silicon-on-insulator material

D. Venables, Stephen Krause, J. D. Lee, J. C. Park, P. Roitman

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Origin of the defect structures in oxygen-implanted silicon-on-insulator material'. Together they form a unique fingerprint.

Engineering & Materials Science