Surface morphology of TiSi₂ on silicon

Engineering & Materials Science

• Low energy electron diffraction 100%
• Surface morphology 50%
• Annealing 44%
• Titanium 43%
• Metastable phases 36%
• Silicon 35%
• Auger electron spectroscopy 34%
• Interfacial energy 27%
• Surface structure 26%
• Film thickness 24%
• Nucleation 23%
• Wetting 22%
• Scanning electron microscopy 17%
• Substrates 15%
• Temperature 8%

Chemical Compounds

• Low Energy Electron Diffraction 58%
• Annealing 35%
• Auger Electron Spectroscopy 25%
• Interfacial Energy 22%
• Surface Structure 21%
• Nucleation 18%
• Surface 14%
• Chemical Transformation 14%
• Scanning Electron Microscopy 13%
• Liquid Film 10%

Physics & Astronomy

• silicon 24%
• electron diffraction 9%
• titanium 9%
• annealing 6%
• Auger spectroscopy 5%
• electron spectroscopy 5%
• surface energy 5%
• wetting 5%
• film thickness 4%
• nucleation 4%
• scanning electron microscopy 3%
• energy 3%
• temperature 1%