Si/Sige modulation doped structures by gas source molecular beam epitaxy using arsenic as a donor

A. Matsumura, R. S. Prasad, T. J. Thornton, J. M. Fernandez, M. H. Xie, X. Zhang, J. Zhang, B. A. Joyce

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

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Engineering & Materials Science