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Enhanced adhesion of copper films to SiO 2, PSG and BPSG by refractory metal additions
S. A. Rafalski, R. L. Spreitzer, S. W. Russell, Terry Alford, J. Li, M. Moinpour, F. Moghadam, J. W. Mayer
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
6
Scopus
citations