DEFECT CONTROL IN PROCESSING OF OXYGEN IMPLANTED SILICON-ON-

Project: Research project

Project Details

StatusFinished
Effective start/end date7/15/892/28/91

Funding

  • DOC: National Institute of Standards and Technology (NIST): $40,000.00

Fingerprint

Explore the research topics touched on by this project. These labels are generated based on the underlying awards/grants. Together they form a unique fingerprint.