UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

Maxim S. Komlenok; Anna M. Zaniewski; Evgeny V. Zavedeev; Vitaly I. Konov; Franz A M Koeck; Robert Nemanich

doi:10.1016/j.diamond.2015.07.009

UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

Maxim S. Komlenok, Anna M. Zaniewski, Evgeny V. Zavedeev, Vitaly I. Konov, Franz A M Koeck, Robert Nemanich

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties.

Original language	English (US)
Pages (from-to)	196-199
Number of pages	4
Journal	Diamond and Related Materials
Volume	58
DOIs	https://doi.org/10.1016/j.diamond.2015.07.009
State	Published - Sep 29 2015

Keywords

AFM
Conductive nanocrystalline diamond
Laser
Nanoablation

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Chemistry(all)
Mechanical Engineering
Physics and Astronomy(all)
Materials Chemistry
Electrical and Electronic Engineering

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10.1016/j.diamond.2015.07.009

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title = "UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films",

abstract = "The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties.",

keywords = "AFM, Conductive nanocrystalline diamond, Laser, Nanoablation",

author = "Komlenok, {Maxim S.} and Zaniewski, {Anna M.} and Zavedeev, {Evgeny V.} and Konov, {Vitaly I.} and Koeck, {Franz A M} and Robert Nemanich",

note = "Funding Information: The authors acknowledge A.A. Khomich from GPI (Russia) for Raman measurements. The travel expenses needed to fulfill bilateral scientific collaboration was supported by U.S. Civilian Research & Development Foundation , #RUP1-7087-XX-13 . Research activities in Russia were supported by the Russian Science Foundation under Grant 14-22-00243 , in the USA by the National Science Foundation under Grant DMR- 1206935 . Publisher Copyright: {\textcopyright} 2015 Elsevier B.V. All rights reserved.",

year = "2015",

month = sep,

day = "29",

doi = "10.1016/j.diamond.2015.07.009",

language = "English (US)",

volume = "58",

pages = "196--199",

journal = "Diamond and Related Materials",

issn = "0925-9635",

publisher = "Elsevier BV",

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TY - JOUR

T1 - UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

AU - Komlenok, Maxim S.

AU - Zaniewski, Anna M.

AU - Zavedeev, Evgeny V.

AU - Konov, Vitaly I.

AU - Koeck, Franz A M

AU - Nemanich, Robert

N1 - Funding Information: The authors acknowledge A.A. Khomich from GPI (Russia) for Raman measurements. The travel expenses needed to fulfill bilateral scientific collaboration was supported by U.S. Civilian Research & Development Foundation , #RUP1-7087-XX-13 . Research activities in Russia were supported by the Russian Science Foundation under Grant 14-22-00243 , in the USA by the National Science Foundation under Grant DMR- 1206935 . Publisher Copyright: © 2015 Elsevier B.V. All rights reserved.

PY - 2015/9/29

Y1 - 2015/9/29

N2 - The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties.

AB - The possibility of laser induced variation of optical and electrical properties of conductive nanocrystalline diamond (CNCD) films has been demonstrated. The films were produced by microwave plasma chemical vapor deposition (MPCVD) from CH4:H2:N2 gas mixtures. The films were irradiated in air with 20 ns pulses of an ArF excimer laser ( = 193 nm). It was found that low laser pulse intensity (∼0.05 J/cm2), well below film surface graphitization (∼0.3 J/cm2) and nanoablation (∼0.08 J/cm2) thresholds, induces changes of the film properties.

KW - AFM

KW - Conductive nanocrystalline diamond

KW - Laser

KW - Nanoablation

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U2 - 10.1016/j.diamond.2015.07.009

DO - 10.1016/j.diamond.2015.07.009

M3 - Article

AN - SCOPUS:84940376292

SN - 0925-9635

VL - 58

SP - 196

EP - 199

JO - Diamond and Related Materials

JF - Diamond and Related Materials

ER -

UV laser induced changes to morphological, optical and electrical properties of conductive nanocrystalline diamond films

Abstract

Keywords

ASJC Scopus subject areas

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