Useful ion yields for Cameca IMS 3f and 6f SIMS: Limits on quantitative analysis

Richard Hervig, Frank K. Mazdab, Peter Williams, Yunbin Guan, Gary R. Huss, Laurie A. Leshin

Research output: Contribution to journalArticlepeer-review

67 Scopus citations


The useful yields (ions detected/atom sputtered) of major and trace elements in NIST 610 glass were measured by secondary ion mass spectrometry (SIMS) using Cameca IMS 3f and 6f instruments. Useful yields of positive ions at maximum transmission range from 10-4 to 0.2 and are negatively correlated with ionization potential. We quantified the decrease in useful yields when applying energy filtering or high mass resolution techniques to remove molecular interferences. The useful yields of selected negative ions (O, S, Au) in magnetite and pyrite were also determined. These data allow the analyst to determine if a particular analysis (trace element contents or isotopic ratio) can be achieved, given the amount of sample available and the conditions of the analysis.

Original languageEnglish (US)
Pages (from-to)83-99
Number of pages17
JournalChemical Geology
Issue number1-2
StatePublished - Mar 20 2006


  • Analytical technique
  • Isotope geochemistry
  • Secondary ion mass spectrometry (SIMS)
  • Trace element geochemistry

ASJC Scopus subject areas

  • Geology
  • Geochemistry and Petrology


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