Towards artifact-free atomic-resolution elemental mapping with electron energy-loss spectroscopy

Y. Zhu, A. Soukiassian, D. G. Schlom, D. A. Muller, C. Dwyer

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


Atomic-resolution elemental maps of materials obtained using energy-loss spectroscopy in the scanning transmission electron microscope (STEM) can contain artifacts associated with strong elastic scattering of the STEM probe. We demonstrate how recent advances in instrumentation enable a simple and robust approach to reduce such artifacts and produce atomic-resolution elemental maps amenable to direct visual interpretation. The concept is demonstrated experimentally for a (BaTiO3)8/(SrTiO3) 4 heterostructure, and simulations are used for quantitative analysis. We also demonstrate that the approach can be used to eliminate the atomic-resolution elastic contrast in maps obtained from lower-energy excitations, such as plasmon excitations.

Original languageEnglish (US)
Article number141908
JournalApplied Physics Letters
Issue number14
StatePublished - Sep 30 2013
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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