Thermodynamics of thin film epitaxy

R. C. Cammarata, Karl Sieradzki

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


The mechanics of thin film epitaxy is developed using an equilibrium thermodynamics formalism and linear elasticity. A virtual variation approach is employed that leads to a direct identification of the important volume and surface thermodynamic parameters characterizing mechanical equilibrium. In particular, the equilibrium volume stress state of an epitaxial film as a function of the film thickness, surface free energies, and surface stresses is obtained. It is shown how this formalism can be used to determine the critical thickness for epitaxy.

Original languageEnglish (US)
Pages (from-to)415-418
Number of pages4
JournalJournal of Applied Mechanics, Transactions ASME
Issue number4
StatePublished - Jul 1 2002
Externally publishedYes

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Mechanics of Materials
  • Mechanical Engineering


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