The characterization of TiNi shape-memory actuated microvalves

B. K. Lai, G. Hahm, L. You, C. L. Shih, H. Kahn, Stephen Phillips, A. H. Heuer

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Scopus citations


Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.

Original languageEnglish (US)
Title of host publicationMaterials Research Society Symposium - Proceedings
EditorsH Kahn, M Boer, M Judy, S Spearing
StatePublished - 2001
Externally publishedYes
EventMaterial Science of Microelectromechanical Systems (MEMS) Devices III - Boston, MA, United States
Duration: Nov 27 2000Nov 28 2000


OtherMaterial Science of Microelectromechanical Systems (MEMS) Devices III
Country/TerritoryUnited States
CityBoston, MA

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials


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