Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn xGe1-x buffer layers

Matthew Bauer; Cole Ritter; Peter Crozier; Jie Ren; Jose Menendez; George Wolf; John Kouvetakis

doi:10.1063/1.1606104

Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn _xGe_1-x buffer layers

Matthew Bauer, Cole Ritter, Peter Crozier, Jie Ren, Jose Menendez, George Wolf, John Kouvetakis

Research output: Contribution to journal › Article › peer-review

109 Scopus citations

Abstract

Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn _xGe_1-x buffer layers was carried out. The crystal structure, elemental distribution and morphological properties of the Si _1-xGe_xSn_y/Ge_1-xSn_x heterostructures were characterized by high-resolution electron microscopy, x-ray diffraction and atomic force microscopy. Growth of epitaxial, uniform and aligned layers with atomically smooth surfaces and monocrystalline structures that havre lattice constants close to Ge was demonstrated.

Original language	English (US)
Pages (from-to)	2163-2165
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	11
DOIs	https://doi.org/10.1063/1.1606104
State	Published - Sep 15 2003

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

Access to Document

10.1063/1.1606104

Cite this

@article{78ddd685d388479ca228a5d8ef7f513a,

title = "Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn xGe1-x buffer layers",

abstract = "Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn xGe1-x buffer layers was carried out. The crystal structure, elemental distribution and morphological properties of the Si 1-xGexSny/Ge1-xSnx heterostructures were characterized by high-resolution electron microscopy, x-ray diffraction and atomic force microscopy. Growth of epitaxial, uniform and aligned layers with atomically smooth surfaces and monocrystalline structures that havre lattice constants close to Ge was demonstrated.",

author = "Matthew Bauer and Cole Ritter and Peter Crozier and Jie Ren and Jose Menendez and George Wolf and John Kouvetakis",

year = "2003",

month = sep,

day = "15",

doi = "10.1063/1.1606104",

language = "English (US)",

volume = "83",

pages = "2163--2165",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "11",

}

TY - JOUR

T1 - Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn xGe1-x buffer layers

AU - Bauer, Matthew

AU - Ritter, Cole

AU - Crozier, Peter

AU - Ren, Jie

AU - Menendez, Jose

AU - Wolf, George

AU - Kouvetakis, John

PY - 2003/9/15

Y1 - 2003/9/15

N2 - Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn xGe1-x buffer layers was carried out. The crystal structure, elemental distribution and morphological properties of the Si 1-xGexSny/Ge1-xSnx heterostructures were characterized by high-resolution electron microscopy, x-ray diffraction and atomic force microscopy. Growth of epitaxial, uniform and aligned layers with atomically smooth surfaces and monocrystalline structures that havre lattice constants close to Ge was demonstrated.

AB - Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn xGe1-x buffer layers was carried out. The crystal structure, elemental distribution and morphological properties of the Si 1-xGexSny/Ge1-xSnx heterostructures were characterized by high-resolution electron microscopy, x-ray diffraction and atomic force microscopy. Growth of epitaxial, uniform and aligned layers with atomically smooth surfaces and monocrystalline structures that havre lattice constants close to Ge was demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=0142058353&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=0142058353&partnerID=8YFLogxK

U2 - 10.1063/1.1606104

DO - 10.1063/1.1606104

M3 - Article

AN - SCOPUS:0142058353

SN - 0003-6951

VL - 83

SP - 2163

EP - 2165

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 11

ER -

Synthesis of ternary SiGeSn semiconductors on Si(100) via Sn _xGe_1-x buffer layers

Abstract

ASJC Scopus subject areas

Access to Document

Other files and links

Fingerprint

Cite this