Surface area enhancement of microcantilevers by femto-second laser irradiation

A. Kumar, S. Rajauria, H. Huo, O. Ozsun, K. Rykaczewski, J. Kumar, K. L. Ekinci

Research output: Contribution to journalArticlepeer-review

3 Scopus citations


A dry single-step process for enhancing the surface area of a silicon microcantilever is described. In this process, a flat microcantilever is irradiated with ∼ 100-femto-second-long laser pulses. The silicon surface melts and rapidly cools, resulting in the formation of nanoscale pillars. The shape and size of these nanostructures can be tuned by changing the energy of the pulses. Resonance measurements on surface-enhanced microcantilevers show that the irradiation process reduces the stiffness and the resonance frequency of the cantilevers. Fluidic dissipation measurements provide an estimate for the surface area increase. Both the enhanced surfaces and the fluidic characteristics of these microcantilevers may be useful in bio-chemical sensing applications.

Original languageEnglish (US)
Article number141607
JournalApplied Physics Letters
Issue number14
StatePublished - Apr 2 2012
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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