Soft and high magnetic moment Co37Fe63 films were electro-deposited with variable additives on Cu/Ti/Si substrates. The correlation between structure and magnetic properties has been investigated. TEM showed the crystal structure of the films to be BCC with a 〈111〉 texture, and a grain size in the range of 10-20 nm. Oxygen in the deposited films has been identified by EDS and EELS using HAADF STEM. SIMS analysis revealed the presence of hydrogen and oxygen in the deposited CoFe films. Electron microscopy results showed that the oxygen was mainly distributed along the grain boundaries in the CoFe film. In regions where oxygen was present in the films, the Fe content was enhanced relative to Co. The magnetic properties of the deposits have been measured by Vibrating Sample Magnetometer (VSM), quantifying the impact of incorporated oxygen in the film on the saturation magnetization and the coercivity.