Static and electrically actuated shaped MEMS mirrors

Bin Mi; David A. Smith; Harold Kahn; Frank L. Merat; Arthur H. Heuer; Stephen Phillips

doi:10.1109/JMEMS.2004.839022

Static and electrically actuated shaped MEMS mirrors

Bin Mi, David A. Smith, Harold Kahn, Frank L. Merat, Arthur H. Heuer, Stephen Phillips

Electrical Engineering

Research output: Contribution to journal › Article › peer-review

20 Scopus citations

Abstract

A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

Original language	English (US)
Pages (from-to)	29-36
Number of pages	8
Journal	Journal of Microelectromechanical Systems
Volume	14
Issue number	1
DOIs	https://doi.org/10.1109/JMEMS.2004.839022
State	Published - Feb 2005

Keywords

Curvature modulation
Microelectromechanical systems (MEMS)
Micromirror
Multilayer
Optical switch

ASJC Scopus subject areas

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2004.839022

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title = "Static and electrically actuated shaped MEMS mirrors",

abstract = "A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.",

keywords = "Curvature modulation, Microelectromechanical systems (MEMS), Micromirror, Multilayer, Optical switch",

author = "Bin Mi and Smith, {David A.} and Harold Kahn and Merat, {Frank L.} and Heuer, {Arthur H.} and Stephen Phillips",

note = "Funding Information: Manuscript received December 4, 2003; revised March 22, 2004. This work was supported in part by NASA by Grants NAG3-2578 and NAG3-2799. Subject Editor H. Zappe.",

year = "2005",

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doi = "10.1109/JMEMS.2004.839022",

language = "English (US)",

volume = "14",

pages = "29--36",

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publisher = "Institute of Electrical and Electronics Engineers Inc.",

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T1 - Static and electrically actuated shaped MEMS mirrors

AU - Mi, Bin

AU - Smith, David A.

AU - Kahn, Harold

AU - Merat, Frank L.

AU - Heuer, Arthur H.

AU - Phillips, Stephen

N1 - Funding Information: Manuscript received December 4, 2003; revised March 22, 2004. This work was supported in part by NASA by Grants NAG3-2578 and NAG3-2799. Subject Editor H. Zappe.

PY - 2005/2

Y1 - 2005/2

N2 - A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

AB - A novel digitally-actuated shaped micromirror for on-off optical switch applications is described. Reflective static spherical mirrors were designed and fabricated using conventional surface micromachining and the MultiPoly process, a technique for depositing multilayers of LPCVD polysilicon in order to control the overall stress and stress gradient. The resulting mirrors were measured to have radii of curvature of approximately 9 mm in agreement with design predictions. Based upon these static mirrors, an actuatable micromirror (diameter = 500 /μm, static radius of curvature = 6.4 mm) was designed for snap action. This mirror was simulated using an electromechanical coupled-field model and fabricated using the MultiPoly process. Its performance was measured dynamically using an interferometer. A curved-to-flat digital actuation of the mirror was successfully achieved with a pull-in voltage of 38 V.

KW - Curvature modulation

KW - Microelectromechanical systems (MEMS)

KW - Micromirror

KW - Multilayer

KW - Optical switch

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Static and electrically actuated shaped MEMS mirrors

Abstract

Keywords

ASJC Scopus subject areas

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