Smart shape memory alloy actuated microvalve with feedback control

Krishnan Nandakumar, Allen G. Parr, Geon Hahm, Michael A. Huff, Stephen Phillips

Research output: Chapter in Book/Report/Conference proceedingConference contribution

7 Scopus citations


The microfluidics group at CWRU has demonstrated a thin film shape memory alloy actuated smart microvalve with feedback control for fluid control. A micromachined flow sensor was designed and fabricated and feedback control electronics were developed and incorporated with a TiNi microvalve to realize the system. The valve is a Titanium Nickel (TiNi) Shape Memory Alloy (SMA) thin film actuated micromachined valve capable of modulating 0-250 ml/min of airflow at 2 psi. The flow sensor used is a micromachined, anemometric type flow sensor. By simulation, the smart controller was designed using MATLAB with Simulink and realized with standard integrated circuits. The performance of the smart valve shows flow insensitivity to pressure variations across the valve. This was demonstrated by a constant flow even when the valve is subject to a change in the pressure drop across the valve. This is in contrast to the typical behavior of standard valves without flow sensing and feedback control.

Original languageEnglish (US)
Title of host publicationAmerican Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC
EditorsR.J. Furness
Place of PublicationFairfield, NJ, United States
Number of pages5
StatePublished - 1998
Externally publishedYes
EventProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition - Anaheim, CA, USA
Duration: Nov 15 1998Nov 20 1998


OtherProceedings of the 1998 ASME International Mechanical Engineering Congress and Exposition
CityAnaheim, CA, USA

ASJC Scopus subject areas

  • Software
  • Mechanical Engineering


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