Second harmonic generation in AlN film

Guojun Yan, Guangde Chen, Youzhang Zhu, Fusheng Qiu, Zhaoyang Fan

Research output: Contribution to journalArticlepeer-review

1 Scopus citations


The crystal structure of AlN film deposited on a (100) surface of a sapphire by a DC reactive magnetron sputtering is studied by a X-ray diffraction, the diagram of the X-ray diffraction shows that the film made by this way is a single crystal film. Using a Nd: YAG laser with a repetition rate of 10 Hz, a pulse width of 10 ns, a maximum average power of 20 W and a maximum energy per pulse of 2 J as a pump, its second harmonic generation is studied. The results indicate that the AlN film deposited on a (100) surface of a sapphire can generate an effective second harmonic wave in a large range of incidence angle, and the generated power of the second harmonic wave is symmetric to the normal of the surface of the AlN film. This proves that the normal of the surface of the AlN film is the axis of the AlN.

Original languageEnglish (US)
Pages (from-to)1245-1248
Number of pages4
JournalGuangxue Xuebao/Acta Optica Sinica
Issue number9
StatePublished - Sep 2004
Externally publishedYes


  • AlN film
  • Nonlinear optics
  • Phase matching
  • Second-harmonic wave
  • Width of phase-dismatching angle

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Atomic and Molecular Physics, and Optics


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