Scattering cross sections in electron microscopy and analysis

Peter Rez

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


The scattering cross section is the fundamental measure of the strength of a scattering interaction. All scattering in electron microscopy arises from the Coulomb interaction, and scattering cross sections, whether elastic or inelastic, will therefore all have common features. Simple forms of both elastic and inelastic cross sections are reviewed in the context of high resolution and analytical microscopy. Some recent developments, such as the calculation of Fano resonances in electron energy loss spectra of transition metals and rare earth elements are also discussed.

Original languageEnglish (US)
Pages (from-to)356-362
Number of pages7
JournalMicroscopy and Microanalysis
Issue number4
StatePublished - Jul 2001


  • Analytical electron microscopy
  • Electron energy loss spectrometry
  • Fano resonance
  • Rare earth elements
  • Scattering cross section
  • Transition metal elements

ASJC Scopus subject areas

  • Instrumentation


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