Scaled silicon MOSFET's: Universal mobility behavior

Dragica Vasileska, David K. Ferry

Research output: Contribution to journalArticlepeer-review

42 Scopus citations


We use a fully quantum-mechanical model to study the inversion layer mobility in a silicon MOS structure. The importance of depletion charge and surface-roughness scattering on the effective electron mobility is examined. The magnitude of the mobility is found to be considerably reduced by both depletion charge and interface-roughness scattering. The appropriate weighting coefficients a and b for the inversion and depletion charge densities in the definition of the effective electric field, which eliminate the doping dependence of the effective electron mobility, are also calculated. These are found to differ from the commonly used values of 0.5 and 1. In addition, the weighting coefficient for the depletion charge density is found to be significantly influenced by the actual shape of the doping profile and can be either >1 or <1.

Original languageEnglish (US)
Pages (from-to)577-583
Number of pages7
JournalIEEE Transactions on Electron Devices
Issue number4
StatePublished - 1997

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering


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