Scalable nanofabrication of U-shaped nanowire resonators with tunable optical magnetism

Split ring resonators have been studied extensively in reconstituting the diminishing magnetism at high electromagnetic frequencies in nature. However, breakdown in the linear scaling of artificial magnetism is found to occur at the near-infrared frequency mainly due to the increasing contribution of self-inductance while reducing dimensions of the resonators. Although alternative designs have enabled artificial magnetism at optical frequencies, their sophisticated configurations and fabrication procedures do not lend themselves to easy implementation. Here, we report scalable nanofabrication of U-shaped nanowire resonators (UNWRs) using the high-throughput nanotransfer printing method. By providing ample area for conducting oscillating electric current, UNWRs overcome the saturation of the geometric scaling of the artificial magnetism. We experimentally demonstrated coarse and fine tuning of LC resonances over a wide wavelength range from 748 nm to 1600 nm. The added flexibility in transferring to other substrates makes UNWR a versatile building block for creating functional metamaterials in three dimensions.