TY - GEN
T1 - Scalable biosensors using standard CMOS process
AU - Noyan, Utku
AU - Lu, Sheung
AU - Christen, Jennifer Blain
AU - Abshire, Pamela
AU - Shah, Sahil
N1 - Publisher Copyright:
© 2023 IEEE.
PY - 2023
Y1 - 2023
N2 - In this study, we present two biosensors, an Ion-Sensitive Field-Effect Transistor (ISFET) and a Capacitance sensor array, both fabricated via a standard 0.5µm CMOS process. The integrated ISFET was comprehensively characterized and measured in a buffer solution across three pH variants (4, 7, and 10), revealing an impressive sensitivity of 35mV per pH unit for our CMOS-based ISFET. To counteract the prevalent issues of drift and mismatch, we have discussed applicable strategies to mitigate them. We utilize the ISFETs to monitor breast cancer cell growth showcasing their use for biomedical application. Moreover, we have introduced a fringe-based capacitance sensor array equipped with readout circuits, which measures the capacitive coupling of cells, thereby facilitating real-time monitoring of cells with high spatial and temporal resolution. Both the ISFET and the capacitance array are integrated on a CMOS substrate, opening avenues for large-scale biosensor integration.
AB - In this study, we present two biosensors, an Ion-Sensitive Field-Effect Transistor (ISFET) and a Capacitance sensor array, both fabricated via a standard 0.5µm CMOS process. The integrated ISFET was comprehensively characterized and measured in a buffer solution across three pH variants (4, 7, and 10), revealing an impressive sensitivity of 35mV per pH unit for our CMOS-based ISFET. To counteract the prevalent issues of drift and mismatch, we have discussed applicable strategies to mitigate them. We utilize the ISFETs to monitor breast cancer cell growth showcasing their use for biomedical application. Moreover, we have introduced a fringe-based capacitance sensor array equipped with readout circuits, which measures the capacitive coupling of cells, thereby facilitating real-time monitoring of cells with high spatial and temporal resolution. Both the ISFET and the capacitance array are integrated on a CMOS substrate, opening avenues for large-scale biosensor integration.
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U2 - 10.1109/IEDM45741.2023.10413777
DO - 10.1109/IEDM45741.2023.10413777
M3 - Conference contribution
AN - SCOPUS:85185594963
T3 - Technical Digest - International Electron Devices Meeting, IEDM
BT - 2023 International Electron Devices Meeting, IEDM 2023
PB - Institute of Electrical and Electronics Engineers Inc.
T2 - 2023 International Electron Devices Meeting, IEDM 2023
Y2 - 9 December 2023 through 13 December 2023
ER -