Relaxation and H coverage of ammonium fluoride treated Si(111)

M. Copel, Robert Culbertson, R. M. Tromp

Research output: Contribution to journalArticlepeer-review

16 Scopus citations


Using medium energy ion scattering and elastic recoil detection, we have studied silicon surfaces prepared by ex situ NH4F wet etching. We report direct measurements of relaxation and hydrogen coverage of the passivated Si(111)-(1×1) surface. For Si(111), nearly ideal, unreconstructed surfaces are obtained, terminated by a single atomic layer of hydrogen. Silicon backscatter yields agree closely with simulations of a bulk truncation, with an inward relaxation of the outermost layer of 0.075±0.03 Å. On the other hand, Si(001) prepared by NH4F solution shows severe roughening.

Original languageEnglish (US)
Pages (from-to)2344-2346
Number of pages3
JournalApplied Physics Letters
Issue number18
StatePublished - 1994

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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