We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.
ASJC Scopus subject areas
- Nuclear and High Energy Physics