TY - JOUR
T1 - Quantitative analysis using sputtered neutrals in a secondary ion microanalyser
AU - Williams, Peter
AU - Streit, Lori A.
N1 - Funding Information:
This work was supported by the National Science Foundation under Grant DMR 8206028.A lGaAs samples and analyses were kindly supplied by Ron Roedel (ASU). TaSi samples and analysesw ere supplied by S.S. Lau (UC San Diego). We appreciate the assistance of Rick Hervig and Greg Gillen.
PY - 1986/4/1
Y1 - 1986/4/1
N2 - We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.
AB - We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.
UR - http://www.scopus.com/inward/record.url?scp=0022040496&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=0022040496&partnerID=8YFLogxK
U2 - 10.1016/0168-583X(86)90274-0
DO - 10.1016/0168-583X(86)90274-0
M3 - Article
AN - SCOPUS:0022040496
SN - 0168-583X
VL - 15
SP - 159
EP - 164
JO - Nuclear Inst. and Methods in Physics Research, B
JF - Nuclear Inst. and Methods in Physics Research, B
IS - 1-6
ER -