Quantitative analysis using sputtered neutrals in a secondary ion microanalyser

Peter Williams, Lori A. Streit

Research output: Contribution to journalArticlepeer-review

31 Scopus citations


We have developed a technique for quantitative analysis of major element levels (> 1%) in a high-sensitivity secondary ion mass spectrometer by gas-phase ionization of sputtered neutral atoms. The neutrals are ionized by impact of primary Ar+ ions. Doubly-charged gas-phase ions are sampled, to ease the problem of rejecting the intense flux of directly-sputtered singly-charged secondary ions. Analytical results for AlGaAs and TaSi sample sets of varying composition are comparable in accuracy with electron microprobe and Rutherford backscattering analyses.

Original languageEnglish (US)
Pages (from-to)159-164
Number of pages6
JournalNuclear Inst. and Methods in Physics Research, B
Issue number1-6
StatePublished - Apr 1 1986

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation


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