Quantitative analysis of strain distribution in InAs/InAs 1-xSbx superlattices

Krishnamurthy Mahalingam, Elizabeth H. Steenbergen, Gail J. Brown, Yong-Hang Zhang

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18 Scopus citations


Atomic resolution transmission electron microscopy is performed to examine the strain distribution in an InAs/InAs1-xSbx superlattice grown on a (100)-GaSb substrate. The strain profiles reveal that the thickness of tensile regions in the superlattice is significantly lower than expected, with a corresponding increase in thickness of the compressive regions. Furthermore, significant grading is observed within the tensile regions of the strain profile, indicating Sb intermixing from the InAsSb growth surface. The results signify an effective reduction in the InAs layer thickness due to the anion (As-Sb) exchange process at the InAs-on-InAsSb interface.

Original languageEnglish (US)
Article number061908
JournalApplied Physics Letters
Issue number6
StatePublished - Aug 5 2013

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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