Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing

Chen Fu Chien, Hans Ehm, John Fowler, Lars Monch, Cheng Hung Wu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

2 Scopus citations


This is a panel paper which discusses the use of Artificial Intelligence (AI) techniques to address production level problems in semiconductor manufacturing. We have gathered a group of expert semiconductor researchers and practitioners from around the world who have applied AI techniques to semiconductor problems and the paper provides their answers to an initial set of questions. These serve to provide a description of the AI work that has taken place already and to make suggestions for future directions in this arena.

Original languageEnglish (US)
Title of host publication2021 Winter Simulation Conference, WSC 2021
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665433112
StatePublished - 2021
Externally publishedYes
Event2021 Winter Simulation Conference, WSC 2021 - Phoenix, United States
Duration: Dec 12 2021Dec 15 2021

Publication series

NameProceedings - Winter Simulation Conference
ISSN (Print)0891-7736


Conference2021 Winter Simulation Conference, WSC 2021
Country/TerritoryUnited States

ASJC Scopus subject areas

  • Software
  • Modeling and Simulation
  • Computer Science Applications


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