@inproceedings{f3c21baa88b3433e9e09271ba8ca5bdb,
title = "Production-Level Artificial Intelligence Applications in Semiconductor Manufacturing",
abstract = "This is a panel paper which discusses the use of Artificial Intelligence (AI) techniques to address production level problems in semiconductor manufacturing. We have gathered a group of expert semiconductor researchers and practitioners from around the world who have applied AI techniques to semiconductor problems and the paper provides their answers to an initial set of questions. These serve to provide a description of the AI work that has taken place already and to make suggestions for future directions in this arena. ",
author = "Chien, {Chen Fu} and Hans Ehm and John Fowler and Lars Monch and Wu, {Cheng Hung}",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 2021 Winter Simulation Conference, WSC 2021 ; Conference date: 12-12-2021 Through 15-12-2021",
year = "2021",
doi = "10.1109/WSC52266.2021.9715399",
language = "English (US)",
series = "Proceedings - Winter Simulation Conference",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2021 Winter Simulation Conference, WSC 2021",
}