Preface

J. Murota; C. Claeys; H. Iwai; M. Tao; S. Deleonibus; A. Mai; K. Shiojima; Y. Cao

doi:10.1149/09204.0003ecst

Preface

J. Murota, C. Claeys, H. Iwai, M. Tao, S. Deleonibus, A. Mai, K. Shiojima, Y. Cao

Research output: Contribution to journal › Editorial › peer-review

Original language	English (US)
Pages (from-to)	3
Number of pages	1
Journal	ECS Transactions
Volume	92
Issue number	4
DOIs	https://doi.org/10.1149/09204.0003ecst
State	Published - 2019
Event	11th Symposium on Semiconductor Process Integration - 236th ECS Meeting - Atlanta, United States Duration: Oct 13 2019 → Oct 17 2019

ASJC Scopus subject areas

General Engineering

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10.1149/09204.0003ecst

Cite this

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title = "Preface",

author = "J. Murota and C. Claeys and H. Iwai and M. Tao and S. Deleonibus and A. Mai and K. Shiojima and Y. Cao",

year = "2019",

doi = "10.1149/09204.0003ecst",

language = "English (US)",

volume = "92",

pages = "3",

journal = "ECS Transactions",

issn = "1938-6737",

publisher = "Electrochemical Society, Inc.",

number = "4",

note = "11th Symposium on Semiconductor Process Integration - 236th ECS Meeting ; Conference date: 13-10-2019 Through 17-10-2019",

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TY - JOUR

T1 - Preface

AU - Murota, J.

AU - Claeys, C.

AU - Iwai, H.

AU - Tao, M.

AU - Deleonibus, S.

AU - Mai, A.

AU - Shiojima, K.

AU - Cao, Y.

PY - 2019

Y1 - 2019

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U2 - 10.1149/09204.0003ecst

DO - 10.1149/09204.0003ecst

M3 - Editorial

AN - SCOPUS:85076998195

SN - 1938-6737

VL - 92

SP - 3

JO - ECS Transactions

JF - ECS Transactions

IS - 4

T2 - 11th Symposium on Semiconductor Process Integration - 236th ECS Meeting

Y2 - 13 October 2019 through 17 October 2019

ER -

Preface

ASJC Scopus subject areas

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