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Precise control of atomic nitrogen production in an electron cyclotron resonance plasma using N
2
/noble gas mixtures
Z. Y. Fan
, N. Newman
Research output
:
Contribution to journal
›
Article
›
peer-review
25
Scopus citations
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Dive into the research topics of 'Precise control of atomic nitrogen production in an electron cyclotron resonance plasma using N
2
/noble gas mixtures'. Together they form a unique fingerprint.
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Physics & Astronomy
electron cyclotron resonance
100%
gas mixtures
86%
rare gases
85%
kinetic energy
72%
nitrogen
66%
nitrogen plasma
57%
nitrogen ions
56%
molecular ions
50%
neon
47%
metastable state
46%
nitrides
42%
argon
35%
ionization
32%
ions
21%