Phase transformations during microcutting tests on silicon

B. V. Tanikella, A. H. Somasekhar, A. T. Sowers, R. J. Nemanich, R. O. Scattergood

Research output: Contribution to journalArticlepeer-review

66 Scopus citations


Controlled slow-speed microcutting tests were made on single crystal silicon. Micro-Raman spectroscopy confirmed the presence of amorphous silicon within the microcutting grooves as well as in the debris particles removed from the grooves. These results indicate that pressure-induced transformation to metallic silicon can occur during microcutting and the ductile metallic phase will facilitate the cutting process. Raman spectroscopy further indicated the presence of large residual tensile strains in some areas of the microcutting grooves.

Original languageEnglish (US)
Pages (from-to)2870-2872
Number of pages3
JournalApplied Physics Letters
Issue number19
StatePublished - Nov 4 1996
Externally publishedYes

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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