Optimization of FIBMOS through 2D Silvaco ATLAS and 2D Monte Carlo particle-based device simulations

J. Kang, X. He, Dragica Vasileska, D. K. Schroder

Research output: Contribution to journalArticlepeer-review

2 Scopus citations


Focused Ion Beam MOSFETs (FIBMOS) demonstrate large enhancements in core device performance areas such as output resistance, hot electron reliability and voltage stability upon channel length or drain voltage variation. In this work, we describe an optimization technique for FIBMOS threshold voltage characterization using the 2D Silvaco ATLAS simulator. Both ATLAS and 2D Monte Carlo particle-based simulations were used to show that FIBMOS devices exhibit enhanced current drive capabilities when compared to normal MOSFETs. It was also found that the device performance is very much dependent upon the FIB implant profile. High and narrow doping of the FIB implant leads to high drain current and low hot carrier reliability, whereas low and wide doping gives rise to lower drain current and higher hot carrier reliability.

Original languageEnglish (US)
Pages (from-to)251-256
Number of pages6
JournalVLSI Design
Issue number1-4
StatePublished - 2001


  • Channel engineering
  • Device sealing
  • FIBMOS devices
  • Hot carrier reliability
  • Threshold voltage characterization

ASJC Scopus subject areas

  • Hardware and Architecture
  • Computer Graphics and Computer-Aided Design
  • Electrical and Electronic Engineering


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