Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al0.05Ga0.95N distributed Bragg reflectors

Young Jae Park, Theeradetch Detchprohm, Karan Mehta, Jialin Wang, Hoon Jeong, Yuh Shiuan Liu, Ping Chen, Shuo Wang, Shyh Chiang Shen, P. Douglas Yoder, Fernando Ponce, Russell Dupuis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

8 Scopus citations


Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

Original languageEnglish (US)
Title of host publicationVertical-Cavity Surface-Emitting Lasers XXIII
EditorsKent D. Choquette, Luke A. Graham
ISBN (Electronic)9781510625181
StatePublished - 2019
EventVertical-Cavity Surface-Emitting Lasers XXIII 2019 - San Francisco, United States
Duration: Feb 6 2019Feb 7 2019

Publication series

NameProceedings of SPIE - The International Society for Optical Engineering
ISSN (Print)0277-786X
ISSN (Electronic)1996-756X


ConferenceVertical-Cavity Surface-Emitting Lasers XXIII 2019
Country/TerritoryUnited States
CitySan Francisco


  • Air gap
  • Distributed Bragg reflector
  • IIINitride semiconductor
  • Metalorganic chemical vapor deposition
  • Stimulated emission
  • Vertical-Cavity Surface Emission Lasers

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Computer Science Applications
  • Applied Mathematics
  • Electrical and Electronic Engineering


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