Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al0.05Ga0.95N distributed Bragg reflectors

Young Jae Park; Theeradetch Detchprohm; Karan Mehta; Jialin Wang; Hoon Jeong; Yuh Shiuan Liu; Ping Chen; Shuo Wang; Shyh Chiang Shen; P. Douglas Yoder; Fernando Ponce; Russell Dupuis

doi:10.1117/12.2510268

Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors

Young Jae Park, Theeradetch Detchprohm, Karan Mehta, Jialin Wang, Hoon Jeong, Yuh Shiuan Liu, Ping Chen, Shuo Wang, Shyh Chiang Shen, P. Douglas Yoder, Fernando Ponce, Russell Dupuis

Physics

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

8 Scopus citations

Abstract

Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

Original language	English (US)
Title of host publication	Vertical-Cavity Surface-Emitting Lasers XXIII
Editors	Kent D. Choquette, Luke A. Graham
Publisher	SPIE
ISBN (Electronic)	9781510625181
DOIs	https://doi.org/10.1117/12.2510268
State	Published - 2019
Event	Vertical-Cavity Surface-Emitting Lasers XXIII 2019 - San Francisco, United States Duration: Feb 6 2019 → Feb 7 2019

Publication series

Name	Proceedings of SPIE - The International Society for Optical Engineering
Volume	10938
ISSN (Print)	0277-786X
ISSN (Electronic)	1996-756X

Conference

Conference	Vertical-Cavity Surface-Emitting Lasers XXIII 2019
Country/Territory	United States
City	San Francisco
Period	2/6/19 → 2/7/19

Keywords

Air gap
Distributed Bragg reflector
IIINitride semiconductor
Metalorganic chemical vapor deposition
Stimulated emission
Vertical-Cavity Surface Emission Lasers

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Computer Science Applications
Applied Mathematics
Electrical and Electronic Engineering

Access to Document

10.1117/12.2510268

Cite this

Park, Y. J., Detchprohm, T., Mehta, K., Wang, J., Jeong, H., Liu, Y. S., Chen, P., Wang, S., Shen, S. C., Yoder, P. D., Ponce, F., & Dupuis, R. (2019). Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors. In K. D. Choquette, & L. A. Graham (Eds.), Vertical-Cavity Surface-Emitting Lasers XXIII Article 109380A (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10938). SPIE. https://doi.org/10.1117/12.2510268

Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors. / Park, Young Jae; Detchprohm, Theeradetch; Mehta, Karan et al.
Vertical-Cavity Surface-Emitting Lasers XXIII. ed. / Kent D. Choquette; Luke A. Graham. SPIE, 2019. 109380A (Proceedings of SPIE - The International Society for Optical Engineering; Vol. 10938).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Park, YJ, Detchprohm, T, Mehta, K, Wang, J, Jeong, H, Liu, YS, Chen, P, Wang, S, Shen, SC, Yoder, PD, Ponce, F & Dupuis, R 2019, Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors. in KD Choquette & LA Graham (eds), Vertical-Cavity Surface-Emitting Lasers XXIII., 109380A, Proceedings of SPIE - The International Society for Optical Engineering, vol. 10938, SPIE, Vertical-Cavity Surface-Emitting Lasers XXIII 2019, San Francisco, United States, 2/6/19. https://doi.org/10.1117/12.2510268

Park YJ, Detchprohm T, Mehta K, Wang J, Jeong H, Liu YS et al. Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al_0.05Ga_0.95N distributed Bragg reflectors. In Choquette KD, Graham LA, editors, Vertical-Cavity Surface-Emitting Lasers XXIII. SPIE. 2019. 109380A. (Proceedings of SPIE - The International Society for Optical Engineering). doi: 10.1117/12.2510268

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title = "Optically pumped vertical-cavity surface-emitting lasers at 375 nm with air-gap/Al0.05Ga0.95N distributed Bragg reflectors",

abstract = "Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.",

keywords = "Air gap, Distributed Bragg reflector, IIINitride semiconductor, Metalorganic chemical vapor deposition, Stimulated emission, Vertical-Cavity Surface Emission Lasers",

author = "Park, {Young Jae} and Theeradetch Detchprohm and Karan Mehta and Jialin Wang and Hoon Jeong and Liu, {Yuh Shiuan} and Ping Chen and Shuo Wang and Shen, {Shyh Chiang} and Yoder, {P. Douglas} and Fernando Ponce and Russell Dupuis",

note = "Funding Information: The authors acknowledge the financial support from a subcontract of Microsemi Corporation, CA. under the DARPA/MTO ACES program (Program manager: Dr. Robert Lutwak and Dr. John Burke; Contract #: PB92205BV/HR-0011-16-C-120). Additional support from the Georgia Research Alliance and the Steve W. Chaddick Chair in Electro-Optics is gratefully acknowledged. The authors wish to thank O. Moreno for his preliminary work on EC etching experiments and the staff in the Institute of Electronics and Nanotechnologies (IEN) at Georgia Institute of Technology for their support for cleanroom operations. Publisher Copyright: {\textcopyright} COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.; Vertical-Cavity Surface-Emitting Lasers XXIII 2019 ; Conference date: 06-02-2019 Through 07-02-2019",

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AU - Park, Young Jae

AU - Detchprohm, Theeradetch

AU - Mehta, Karan

AU - Wang, Jialin

AU - Jeong, Hoon

AU - Liu, Yuh Shiuan

AU - Chen, Ping

AU - Wang, Shuo

AU - Shen, Shyh Chiang

AU - Yoder, P. Douglas

AU - Ponce, Fernando

AU - Dupuis, Russell

N1 - Funding Information: The authors acknowledge the financial support from a subcontract of Microsemi Corporation, CA. under the DARPA/MTO ACES program (Program manager: Dr. Robert Lutwak and Dr. John Burke; Contract #: PB92205BV/HR-0011-16-C-120). Additional support from the Georgia Research Alliance and the Steve W. Chaddick Chair in Electro-Optics is gratefully acknowledged. The authors wish to thank O. Moreno for his preliminary work on EC etching experiments and the staff in the Institute of Electronics and Nanotechnologies (IEN) at Georgia Institute of Technology for their support for cleanroom operations. Publisher Copyright: © COPYRIGHT SPIE. Downloading of the abstract is permitted for personal use only.

PY - 2019

Y1 - 2019

N2 - Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

AB - Optically pumped VCSELs with a 1λ thick optical cavity lasing at 375 nm have been demonstrated using a pulsed 248 nm KrF excimer laser source. To realize a high-reflectivity mirror on the bottom of the cavity, five-period airgap/ Al0.05Ga0.95N DBRs with a large refractive index contrast have been employed while the top mirror was formed by dielectric DBRs consisting of twelve pairs HfO2/SiO2. The lowest threshold incident power density measured at room temperature was estimated to be ∼270 kW/cm2. The achieved optically pumped VCSEL demonstrates the possibility that the airgap/AlxGa1-xN DBRs can be used as a mirror for injection laser devices.

KW - Air gap

KW - Distributed Bragg reflector

KW - IIINitride semiconductor

KW - Metalorganic chemical vapor deposition

KW - Stimulated emission

KW - Vertical-Cavity Surface Emission Lasers

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