Nanoscale oxide patterning with electron-solid-gas reactions

Research output: Contribution to journalArticlepeer-review

12 Scopus citations


A novel nanoscale oxide patterning technique based on electron beam induced transformation in a gas environment is demonstrated. Localized phase transformation is induced in the surface region of a substrate, resulting in the formation of an oxide pattern that is embedded in the surface. The composition of the transformed region is determined only by the substrate and gas composition. The spatial resolution of the technique is about 15 nm.

Original languageEnglish (US)
Pages (from-to)2395-2398
Number of pages4
JournalNano Letters
Issue number8
StatePublished - Aug 2007

ASJC Scopus subject areas

  • Bioengineering
  • General Chemistry
  • General Materials Science
  • Condensed Matter Physics
  • Mechanical Engineering


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