Nanometer-resolution Auger electron spectroscopy and microscopy of small particles

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Small metal particles have peculiar physical and chemical properties and they are especially important in catalysis. To extract compositional information about the surface species, a chemically specific and surface sensitive signal such as Auger electrons must be used. Auger electron (AE) spectroscopy (AES) and scanning Auger microscopy (SAM) have been widely used for surface and catalyst characterization. It is necessary to have nanometer scale resolution in SAM images in order to observe the active phases (small particles) of supported catalysts. In this study, a spatial resolution of approximately 3 nm in SAM images has been achieved on bulk samples, and a higher spatial resolution of about 1 nm has been obtained on thin specimens, by employing magnetic parallelizers in the UHV scanning transmission electron microscopy (STEM) known as MIDAS (a Microscope for Imaging, Diffraction and Analysis of Surfaces). Surface chemical information about the Ag/carbon system has been obtained by taking four images, at and above the carbon and silver Auger peak energies. The contrast mechanisms of small particles in nanometer resolution SAM images have been investigated.

Original languageEnglish (US)
Title of host publicationProceedings - Annual Meeting, Microscopy Society of America
PublisherPubl by San Francisco Press Inc
Number of pages2
StatePublished - 1993
EventProceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA
Duration: Aug 1 1993Aug 6 1993


OtherProceedings of the 51st Annual Meeting Microscopy Society of America
CityCincinnati, OH, USA

ASJC Scopus subject areas

  • Engineering(all)


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