Nanodynamics of vapor-phase organophosphates on silicon and OTS for lubrication purposes

W. Weeyakorn, S. M. Lee, O. Parker, J. E. Burnette, L. S. Bilbro, R. J. Nemanich, J. Krim

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


We have performed a quartz crystal microbalance (QCM) study of the nanotribological properties of organophosphate (tricresylphosphate and t-butyl phenylphosphate) layers adsorbed from the vapor phase onto silicon (amorphous silicon and MEMS-like polysilicon), and octadecyltrichlorosilane (OTS) treated silicon and gold surfaces. The latter systems have been studied in order to explore whether organophosphates and OTS in combination might prove synergistic from a tribological point of view [1]. There is a strong possibility that this combination will also exhibit synergistic tribological behaviors when tested on actual MEMS devices. Therefore, it is important to perform QCM measurement on silicon that is as close to that of MEMS devices. In order to perform this study, we have developed a deposition method involving a Si-Ge layer that enables the growth of polycrystalline silicon on top of Cu QCM electrodes. The structural and morphological properties of these samples have been characterized with Raman spectroscopy and atomic force microscopy (AFM), confirming that they are similar in nature to the silicon in actual MEMS devices.

Original languageEnglish (US)
Title of host publicationProceedings of the World Tribology Congress III - 2005
Number of pages2
StatePublished - Dec 1 2005
Externally publishedYes
Event2005 World Tribology Congress III - Washington, D.C., United States
Duration: Sep 12 2005Sep 16 2005

Publication series

NameProceedings of the World Tribology Congress III - 2005


Other2005 World Tribology Congress III
Country/TerritoryUnited States
CityWashington, D.C.

ASJC Scopus subject areas

  • General Engineering


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