Several types of microfabricated mechanical filters are analyzed for RF communications applications and their advantages over the traditional SAW or FBAR filters are described. GHz frequency operation requires sub-micron dimensions. This work focuses on the modeling of a filter with torsional mode vibration. Ansys finite element simulation has been performed to make comparison with the analytical modelling. These devices enable a networked approach to control along with a specific application to velocity estimation in servocontrol.
ASJC Scopus subject areas
- General Physics and Astronomy