Multiplexed free-standing nanowire transistor bioprobe for intracellular recording: A general fabrication strategy

Recent advance in free-standing nanowire transistor bioprobes opens up new opportunities of accurately interfacing spatially unobstructed nanoscale sensors with live cells. However, the existing fabrication procedures face efficiency and yield limitations when working with more complex nanoscale building blocks to integrate, for example, multiplexed recordings or additional functionalities. To date, only single-kinked silicon nanowires have been successfully used in such probes. Here we establish a general fabrication strategy to mitigate such limitations with which synthetically designed complex nanoscale building blocks can be readily used without causing significant penalty in yield or fabrication time, and the geometry of the probe can be freely optimized based on the orientation and structure of the building blocks. Using this new fabrication framework, we demonstrate the first multiplexed free-standing bioprobe based on w-shaped silicon kinked nanowires that are synthetically integrated with two nanoscale field-effect transistor devices. Simultaneous recording of intracellular action potentials from both devices have been obtained of a single spontaneously beating cardiomyocyte.