Abstract
Multiple scattering of fast (0. 1-3 MeV) electrons in transmission electron microscopy has important consequences for various aspects of microanalysis. The multiple scattering in the energy loss spectrum can have effects on edge visibility and quantitative results. The spreading of the beam due to multiple scattering is important for determining the spatial resolution of x-ray microanalysis. The objective of this work is to show that one can take all these effects into consideration by solving the transport equation assuming small angle scattering.
| Original language | English (US) |
|---|---|
| Title of host publication | Proceedings, Annual Conference - Microbeam Analysis Society |
| Place of Publication | San Francisco Press, Calif |
| Publisher | Inc |
| Pages | 117-118 |
| Number of pages | 2 |
| State | Published - 1979 |
| Externally published | Yes |
| Event | Proc Annu Conf Microbeam Anal Soc 14th - San Antonio, Tex Duration: Aug 12 1979 → Aug 17 1979 |
Other
| Other | Proc Annu Conf Microbeam Anal Soc 14th |
|---|---|
| City | San Antonio, Tex |
| Period | 8/12/79 → 8/17/79 |
ASJC Scopus subject areas
- General Engineering