Molecular dynamics simulation of copper thin film growth on β-Ta (002) substrate

Engineering & Materials Science

• Film growth 100%
• Molecular dynamics 70%
• Thin films 59%
• Copper 51%
• Substrates 44%
• Computer simulation 34%
• Diffusion barriers 23%
• Tantalum 21%
• Texturing 20%
• Semiconductor devices 18%
• Metallizing 18%
• Atoms 16%
• Adhesion 14%
• Textures 12%
• Experiments 5%

Chemical Compounds

• Molecular Dynamics 46%
• Simulation 39%
• Diffusion Barrier 39%
• Crystalline Texture 30%
• Liquid Film 30%
• Semiconductor 24%
• Force 21%