Modified CVD of nanoscale structures in and EVD of thin layers on porous ceramic membranes

L. G.J. de Haart, Y. S. Lin, K. J. de Vries, A. J. Burggraaf

Research output: Contribution to journalArticlepeer-review

31 Scopus citations


Experiments on the modified chemical vapour deposition (CVD) and the electrochemical vapour deposition (EVD) of yttria-stabilized zirconia on porous substrates are reported. It is shown that, in the CVD stage, deposition occurs in a small (<20 μm) region at the edge of the substrate, very likely leading to pore narrowing. This result illustrates the feasibility of the CVD technique for the modification of ceramic membranes to the (sub)nanometer scale. Film growth in the EVD stage is shown to be controlled by the inpore diffusion of the oxygen source reactant for short (<5 h) deposition times. The yttria to zirconia ratio in the deposited film is determined by the ratio present in the vapour phase. Very thin (≤2 μm) films can be deposited, which have a potential application in solid oxide fuel cells.

Original languageEnglish (US)
Pages (from-to)59-70
Number of pages12
JournalJournal of the European Ceramic Society
Issue number1
StatePublished - 1991
Externally publishedYes

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry


Dive into the research topics of 'Modified CVD of nanoscale structures in and EVD of thin layers on porous ceramic membranes'. Together they form a unique fingerprint.

Cite this