Modeling and simulation of transistor performance shift under pattern-dependent RTA process

Yun Ye, Frank Liu, Yu Cao

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations

Fingerprint

Dive into the research topics of 'Modeling and simulation of transistor performance shift under pattern-dependent RTA process'. Together they form a unique fingerprint.

Mathematics

Physics & Astronomy

Engineering & Materials Science

Chemical Compounds