Model predictions of feature-size-dependent step coverages by PVD aluminum: surface diffusion

T. S. Cale, T. H. Gandy, Gregory Raupp, M. Ramaswami

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Fingerprint

Dive into the research topics of 'Model predictions of feature-size-dependent step coverages by PVD aluminum: surface diffusion'. Together they form a unique fingerprint.

Engineering & Materials Science

Physics & Astronomy

Chemical Compounds