TY - JOUR
T1 - Minimizing total weighted tardiness on a single batch process machine with incompatible job families
AU - Perez, Imelda C.
AU - Fowler, John
AU - Carlyle, W. Matthew
N1 - Funding Information:
This research was partially supported by the National Science Foundation under grant DMII-9713750 and by the Semiconductor Research Corporation and International SEMATECH under grant 2001-NJ-880.
PY - 2005/2
Y1 - 2005/2
N2 - The diffusion step in semiconductor wafer fabrication is very time consuming, compared to other steps in the process, and performance in this area has a significant impact on overall factory performance. Diffusion furnaces are able to process multiple lots of similar wafers at a time, and are therefore appropriately modeled as batch processing machines with incompatible job families. Due to the importance of on-time delivery in semiconductor manufacturing, we focus on minimizing the total weighted tardiness in this environment. The resulting problem is NP-Hard, and we decompose it into two sequential decision problems: assigning lots to batches followed by sequencing the batches. We develop several heuristics for these subproblems and test their performance.
AB - The diffusion step in semiconductor wafer fabrication is very time consuming, compared to other steps in the process, and performance in this area has a significant impact on overall factory performance. Diffusion furnaces are able to process multiple lots of similar wafers at a time, and are therefore appropriately modeled as batch processing machines with incompatible job families. Due to the importance of on-time delivery in semiconductor manufacturing, we focus on minimizing the total weighted tardiness in this environment. The resulting problem is NP-Hard, and we decompose it into two sequential decision problems: assigning lots to batches followed by sequencing the batches. We develop several heuristics for these subproblems and test their performance.
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U2 - 10.1016/S0305-0548(03)00239-9
DO - 10.1016/S0305-0548(03)00239-9
M3 - Article
AN - SCOPUS:4544293356
SN - 0305-0548
VL - 32
SP - 327
EP - 341
JO - Computers and Operations Research
JF - Computers and Operations Research
IS - 2
ER -