Mid-infrared thermomechanical sensitivity of microcantilevers for application to infrared spectroscopy

Beomjin Kwon, William P. King, Matthew Schulmerich, Rohit Bhargava

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Scopus citations


We report the use of bimaterial microcantilever sensors for sensing narrow-band infrared (IR) radiation generated by a monochromator and its application to IR spectroscopy of polymer films. We selected microcantilever sensors of either silicon or silicon nitride and having a thin metal film coating. To assess the IR measurement capability of these cantilevers, the IR sensitivity to noise ratio (SNR), was measured in the mid-IR fingerprint spectral region (5 - 10 μ m or 1000 - 2000 cm-1). The measured SNR was in the range of 8 - 90. We further demonstrated the utility of these sensors by using them to collect an IR absorbance spectrum of 1 μm thick polycarbonate film. The characteristic IR peaks for this film could be seen, and compare well with conventional Fourier Transform IR (FT-IR) data. The spectral resolution of the cantilever sensors determined to be in the range 32 - 64 cm-1.

Original languageEnglish (US)
Title of host publicationIEEE Sensors 2010 Conference, SENSORS 2010
Number of pages4
StatePublished - Dec 1 2010
Externally publishedYes
Event9th IEEE Sensors Conference 2010, SENSORS 2010 - Waikoloa, HI, United States
Duration: Nov 1 2010Nov 4 2010

Publication series

NameProceedings of IEEE Sensors


Other9th IEEE Sensors Conference 2010, SENSORS 2010
Country/TerritoryUnited States
CityWaikoloa, HI

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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