Abstract
In this study, we characterized nano-structured Mn doped BST thin-films fabricated using a pulsed laser deposition process at the University of Houston, and PST thin-films fabricated using MOCVD at the Arizona State University. Coplanar waveguide test structures were used for experimental evaluation of the dielectric properties of the BST and PST thin-films fabricated on MgO and saphire substrates respectively. The test structures were fabricated on bare substrates as well as on the thin-film test samples for determination of attenuation and phase constants with and without the ferroelectric thin-films. The ε film for the Mn:BST film was approximately 1200 over the frequency range of 15-30 GHz with the loss-tangent averaging to 0.033. The PST thin-film on sapphire substrate had a zero-bias relative dielectric constant of 200 and the loss-tangent was estimated to be 0.05 over the measured frequency range of 10 to 18 GHz.
| Original language | English (US) |
|---|---|
| Title of host publication | Integrated Ferroelectrics |
| Pages | 189-197 |
| Number of pages | 9 |
| Volume | 77 |
| DOIs | |
| State | Published - 2006 |
| Event | Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 - Shanghai, China Duration: Apr 17 2005 → Apr 20 2005 |
Other
| Other | Seventeenth International Symposium on Integrated Ferroelectrics, ISIF-17 |
|---|---|
| Country/Territory | China |
| City | Shanghai |
| Period | 4/17/05 → 4/20/05 |
Keywords
- BST thin-films
- Ferroelectric thin-films
- Microwave dielectrics
- PST thin-films
ASJC Scopus subject areas
- Electrical and Electronic Engineering
- Physics and Astronomy (miscellaneous)
- Condensed Matter Physics
- Electronic, Optical and Magnetic Materials