Micromachined silicon fuel atomizers for gas turbine engines

Angad Singh, Mehran Mehregany, Stephen M. Phillips, Rex J. Harvey, Michael Benjamin

Research output: Contribution to journalArticlepeer-review

24 Scopus citations


This article presents results on fabrication and testing of micromachined fuel atomizers for gas turbine engines. Pressure-swirl (simplex) atomizers are batch fabricated by bulk micromachining of silicon using deep reactive ion etching. The atomizers are fabricated as an array, according to a designed experiment, and a study of the influence of the geometric features on the performance of the atomizers identifies the dominant geometric parameters The precision of the fabrication allows the atomizer design to be optimized by a response surface methodology. A comparative study reveals that microfabrication can improve the spray performance relative to conventional atomizers.

Original languageEnglish (US)
Pages (from-to)405-418
Number of pages14
JournalAtomization and Sprays
Issue number4
StatePublished - Jan 1 1998
Externally publishedYes

ASJC Scopus subject areas

  • Chemical Engineering(all)


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