Microfabricated tuning fork temperature and infrared sensor

Francis Tsow, Nongjian Tao

Research output: Contribution to journalArticlepeer-review

20 Scopus citations


The authors demonstrated a microfabricated tuning fork temperature/infrared sensor with noise equivalent temperature difference (NETD) of 0.5 mK at 20 °C and with a thermal limited noise level of 5 μ°C. The sensor raw material can cost less than 10 cents each and has a time constant of approximately 50 ms. The sensitivity of infrared signal can potentially be further improved and optimized by selecting polymer materials with a proper thermal response.

Original languageEnglish (US)
Article number174102
JournalApplied Physics Letters
Issue number17
StatePublished - 2007

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)


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