Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors

Kevin C. Stark; A. Azzam Yasseen; Stephen Phillips; Mehran Mehregany

Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors

Kevin C. Stark, A. Azzam Yasseen, Stephen Phillips, Mehran Mehregany

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Polysilicon surface micromachining using polysilicon for the structural material, silicon nitride or silicon dioxide for electrical isolation, and silicon dioxide for the sacrificial material, has formed the technology base for the development of class of electrostatic micro-actuators. Polysilicon surface micromachining has also been used to implement rotary micromotors. Design and fabrication of outer-rotor micromotors, and micro torque measurement utilizing mechanically-coupled outer-rotor micromotors is presented.

Original language	English (US)
Title of host publication	Proceedings of IEEE Sensors
Pages	1751-1756
Number of pages	6
Volume	1
Edition	2
State	Published - 2002
Externally published	Yes
Event	First IEEE International Conference on Sensors - IEEE Sensors 2002 - Orlando, FL, United States Duration: Jun 12 2002 → Jun 14 2002

Other

Other	First IEEE International Conference on Sensors - IEEE Sensors 2002
Country/Territory	United States
City	Orlando, FL
Period	6/12/02 → 6/14/02

Keywords

Micro torque
Micromotor
Polysilicon actuator

ASJC Scopus subject areas

Engineering (miscellaneous)
Electrical and Electronic Engineering

Cite this

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title = "Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors",

abstract = "Polysilicon surface micromachining using polysilicon for the structural material, silicon nitride or silicon dioxide for electrical isolation, and silicon dioxide for the sacrificial material, has formed the technology base for the development of class of electrostatic micro-actuators. Polysilicon surface micromachining has also been used to implement rotary micromotors. Design and fabrication of outer-rotor micromotors, and micro torque measurement utilizing mechanically-coupled outer-rotor micromotors is presented.",

keywords = "Micro torque, Micromotor, Polysilicon actuator",

author = "Stark, {Kevin C.} and Yasseen, {A. Azzam} and Stephen Phillips and Mehran Mehregany",

year = "2002",

language = "English (US)",

volume = "1",

pages = "1751--1756",

booktitle = "Proceedings of IEEE Sensors",

edition = "2",

note = "First IEEE International Conference on Sensors - IEEE Sensors 2002 ; Conference date: 12-06-2002 Through 14-06-2002",

}

TY - GEN

T1 - Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors

AU - Stark, Kevin C.

AU - Yasseen, A. Azzam

AU - Phillips, Stephen

AU - Mehregany, Mehran

PY - 2002

Y1 - 2002

N2 - Polysilicon surface micromachining using polysilicon for the structural material, silicon nitride or silicon dioxide for electrical isolation, and silicon dioxide for the sacrificial material, has formed the technology base for the development of class of electrostatic micro-actuators. Polysilicon surface micromachining has also been used to implement rotary micromotors. Design and fabrication of outer-rotor micromotors, and micro torque measurement utilizing mechanically-coupled outer-rotor micromotors is presented.

AB - Polysilicon surface micromachining using polysilicon for the structural material, silicon nitride or silicon dioxide for electrical isolation, and silicon dioxide for the sacrificial material, has formed the technology base for the development of class of electrostatic micro-actuators. Polysilicon surface micromachining has also been used to implement rotary micromotors. Design and fabrication of outer-rotor micromotors, and micro torque measurement utilizing mechanically-coupled outer-rotor micromotors is presented.

KW - Micro torque

KW - Micromotor

KW - Polysilicon actuator

UR - http://www.scopus.com/inward/record.url?scp=1542360818&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=1542360818&partnerID=8YFLogxK

M3 - Conference contribution

AN - SCOPUS:1542360818

VL - 1

SP - 1751

EP - 1756

BT - Proceedings of IEEE Sensors

T2 - First IEEE International Conference on Sensors - IEEE Sensors 2002

Y2 - 12 June 2002 through 14 June 2002

ER -

Micro Torque Measurement Using Outer-Rotor Polysilicon Micromotors

Abstract

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Keywords

ASJC Scopus subject areas

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Cite this