Metal-Assisted Electrochemical Nanoimprinting of Porous and Solid Silicon Wafers

Engineering & Materials Science

• Porous silicon 100%
• Silicon wafers 81%
• Metals 43%
• Catalysts 28%
• Etching 24%
• Semiconductor materials 19%
• Nanoimprint lithography 17%
• Hydrofluoric acid 17%
• Dry etching 16%
• Defect density 16%
• Reactive ion etching 15%
• Precious metals 14%
• Hydrogen peroxide 14%
• Substrates 7%
• Throughput 7%

Medicine & Life Sciences

• Silicon 81%
• Metals 58%
• Semiconductors 27%
• gallium arsenide 16%
• Hydrofluoric Acid 14%
• Hydrogen Peroxide 9%
• Ions 7%

Chemical Compounds

• Etching 60%
• Porosity 39%
• Noble Metal 16%
• Catalyst 14%
• Hydrogen Peroxide 13%
• Semiconductor 12%
• Mixture 7%
• Ion 6%
• Acid 5%