MEMS shock sensor fabricated on flexible substrate

Narendra V. Lakamraju; Stephen Phillips; Sameer M. Venugopal; David Allee

doi:10.1109/FEDC.2009.5069281

MEMS shock sensor fabricated on flexible substrate

Narendra V. Lakamraju, Stephen Phillips, Sameer M. Venugopal, David Allee

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

5 Scopus citations

Abstract

Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[l, 2] on flexible substrates[l], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest.

Original language	English (US)
Title of host publication	2009 Flexible Electronics and Displays Conference and Exhibition, FLEX 2009
DOIs	https://doi.org/10.1109/FEDC.2009.5069281
State	Published - 2009
Event	Flexible Electronics and Displays Conference and Exhibition, FLEX 2009 - Duration: Feb 2 2009 → Feb 2 2009

Other

Other	Flexible Electronics and Displays Conference and Exhibition, FLEX 2009
Period	2/2/09 → 2/2/09

Keywords

Flexible
MEMS
Sensor
Shock

ASJC Scopus subject areas

Electrical and Electronic Engineering

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10.1109/FEDC.2009.5069281

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title = "MEMS shock sensor fabricated on flexible substrate",

abstract = "Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[l, 2] on flexible substrates[l], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest.",

keywords = "Flexible, MEMS, Sensor, Shock",

author = "Lakamraju, {Narendra V.} and Stephen Phillips and Venugopal, {Sameer M.} and David Allee",

year = "2009",

doi = "10.1109/FEDC.2009.5069281",

language = "English (US)",

booktitle = "2009 Flexible Electronics and Displays Conference and Exhibition, FLEX 2009",

note = "Flexible Electronics and Displays Conference and Exhibition, FLEX 2009 ; Conference date: 02-02-2009 Through 02-02-2009",

}

TY - GEN

T1 - MEMS shock sensor fabricated on flexible substrate

AU - Lakamraju, Narendra V.

AU - Phillips, Stephen

AU - Venugopal, Sameer M.

AU - Allee, David

PY - 2009

Y1 - 2009

N2 - Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[l, 2] on flexible substrates[l], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest.

AB - Incorporating sensors onto a flexible substrate will add functionality to flexible displays. Though several attempts have been made to mount MEMS sensors[l, 2] on flexible substrates[l], none of the sensors have been integrally fabricated on the substrate[3]. Fabricating MEMS sensors on flexible substrates [4] along with display elements will provide new sensing capabilities and enhance functionality. We propose a MEMS capacitive sensor fabricated in a low temperature, flexible amorphous silicon process. This sensor will enable acoustic detection and have potential applications for blast dosimetry [5], a research topic currently of great interest.

KW - Flexible

KW - MEMS

KW - Sensor

KW - Shock

UR - http://www.scopus.com/inward/record.url?scp=70349904942&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=70349904942&partnerID=8YFLogxK

U2 - 10.1109/FEDC.2009.5069281

DO - 10.1109/FEDC.2009.5069281

M3 - Conference contribution

AN - SCOPUS:70349904942

BT - 2009 Flexible Electronics and Displays Conference and Exhibition, FLEX 2009

T2 - Flexible Electronics and Displays Conference and Exhibition, FLEX 2009

Y2 - 2 February 2009 through 2 February 2009

ER -

MEMS shock sensor fabricated on flexible substrate

Abstract

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Keywords

ASJC Scopus subject areas

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