MEMS harsh environment sensor array-enabled hot spring mapping

Jonathon Oiler, Everett Shock, Hilairy Hartnett, Hongyu Yu

Research output: Chapter in Book/Report/Conference proceedingConference contribution


We report the design and application of MEMS temperature and electrical conductivity sensor arrays for studying the harsh environments of hot springs. Centimeter-scale measurements were necessary to measure geochemical gradients across photosynthetic bacteria transition zones. Platinum, Parylene-C, and fused silica were critical materials used in fabrication. More than 700 temperature and 90 conductivity measurements were taken in the mixing zone where two geochemically different hot spring channels converged and the data show that the temperature gradients play an important role in determining where photosynthetic organisms appear. Additionally, a novel technique was developed for studying conservative parameters at centimeter spatial scales.

Original languageEnglish (US)
Title of host publicationIEEE SENSORS 2013 - Proceedings
PublisherIEEE Computer Society
ISBN (Print)9781467346405
StatePublished - Jan 1 2013
Event12th IEEE SENSORS 2013 Conference - Baltimore, MD, United States
Duration: Nov 4 2013Nov 6 2013

Publication series

NameProceedings of IEEE Sensors


Other12th IEEE SENSORS 2013 Conference
Country/TerritoryUnited States
CityBaltimore, MD

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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