TY - GEN
T1 - Mechanical properties of indium tin oxide on polyethylene napthalate substrate
AU - Bhagat, S.
AU - Zoo, Y.
AU - Han, H.
AU - Lewis, J.
AU - Grego, S.
AU - Lee, K.
AU - Iyer, S.
AU - Alford, Terry
PY - 2007
Y1 - 2007
N2 - This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.
AB - This work investigates the mechanical properties of indium tin oxide deposited on polyethylene napthalate substrates by rf sputtering method as a function of deposition conditions, including rf power, substrate temperature, and substrate treatment. X-ray diffraction analysis, Rutherford backscattering spectrometry and mechanical bending analysis are used for characterization of samples. The best mechanical performance represented by bending of the film stack is obtained from high substrate temperature and low rf power. Plasma treatment gases also influence mechanical properties, with mixture of nitrogen and hydrogen gases producing the best results. This work provides an initial understanding of the impact of sputter process conditions on film's mechanical performance.
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U2 - 10.1557/proc-1012-y12-21
DO - 10.1557/proc-1012-y12-21
M3 - Conference contribution
AN - SCOPUS:38549124929
SN - 9781558999725
T3 - Materials Research Society Symposium Proceedings
SP - 401
EP - 406
BT - 2007 MRS Spring Meeting
PB - Materials Research Society
T2 - 2007 MRS Spring Meeting
Y2 - 9 April 2007 through 13 April 2007
ER -