Maximizing delivery performance in semiconductor wafer fabrication facilities

Scott J. Mason, John Fowler

Research output: Chapter in Book/Report/Conference proceedingConference contribution

6 Scopus citations


This paper is motivated by the problem of scheduling customer orders (jobs) in a semiconductor fabrication facility (`wafer fab') to maximize delivery performance when the jobs have non-identical priorities (weights). As each job is typically assigned a weight based on its size, value, and/or requesting customer, a wafer fab's delivery performance can be evaluated in terms of minimizing the sum of each job's weighted tardiness. A heuristic has been proposed for obtaining `good' solutions to this complex problem. Using a `real world' wafer fab data model, the heuristic is compared to a number of dispatching rules in terms of how well each method produces job sequences that maximize delivery performance of customer orders. Results suggest that the heuristic consistently produces the best overall schedules, but there is a price to be paid in terms of solution speed.

Original languageEnglish (US)
Title of host publicationWinter Simulation Conference Proceedings
Number of pages6
StatePublished - 2000
Event2000 Winter Simulation Proceedings - Orlando, FL, USA
Duration: Dec 10 2000Dec 13 2000


Other2000 Winter Simulation Proceedings
CityOrlando, FL, USA

ASJC Scopus subject areas

  • Chemical Health and Safety
  • Software
  • Safety, Risk, Reliability and Quality
  • Applied Mathematics
  • Modeling and Simulation


Dive into the research topics of 'Maximizing delivery performance in semiconductor wafer fabrication facilities'. Together they form a unique fingerprint.

Cite this